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| sputter coating ： ウィキペディア英語版 |
sputter coating
Sputter coating in scanning electron microscopy is a sputter deposition process to cover a specimen with a thin layer of conducting material, typically a metal, such as a gold/palladium (Au/Pd) alloy. A conductive coating is needed to prevent charging of a specimen with an electron beam in conventional SEM mode (high vacuum, high voltage). While metal coatings are also useful for increasing signal to noise ratio (heavy metals are good secondary electron emitters), they are of inferior quality when X-ray spectroscopy is employed. For this reason when using X-ray spectroscopy a carbon coating is preferred.
== References ==
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抄文引用元・出典: フリー百科事典『 ウィキペディア（Wikipedia）』
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